METHOD OF GROWING THIN FILM,申请号JP19870166352-传众专利搜索

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发明名称	METHOD OF GROWING THIN FILM
摘要
申请公布号	JPS6410621(A)	申请公布日期	1989.01.13
申请号	JP19870166352	申请日期	1987.07.03
申请人	FUJITSU LTD	发明人	NARA YASUO
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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