| 摘要 |
A carrier for silicon wafers and the like for use in processing wafers, the carrier having side components and end components, the side components being tubular rails with wafer spacing and supporting teeth projecting therefrom, the side rails being of tubular plastic and having rigid inserts or rods embedded therein, the end components of the carrier being generally panel shaped and having rigid inserts or panels embedded therein, the inserts, in either rod form or panel form being formed of rigid material which is highly stable and resistant to the influences of high temperatures and strong chemicals to maintain its shape and structural integrity and formed of any of a number of materials such as quartz, ceramics, glass, and metals resistant to corrosion such as stainless steel. |
