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经营范围
发明名称
FORMATION OF THIN ORGANIC FILM
摘要
申请公布号
JPS648261(A)
申请公布日期
1989.01.12
申请号
JP19870163784
申请日期
1987.06.30
申请人
TOSHIBA CORP
发明人
WATANABE TORU;OKUMURA KATSUYA
分类号
C23C14/12;C23C14/34;H01L21/31;H01L21/312
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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