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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS649651(A)
申请公布日期
1989.01.12
申请号
JP19870165843
申请日期
1987.07.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORIYA JUNICHI
分类号
H01L27/092;H01L21/8238;H01L27/08
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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