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发明名称
ION IMPLANTER
摘要
申请公布号
JPS648270(A)
申请公布日期
1989.01.12
申请号
JP19870163368
申请日期
1987.06.29
申请人
NISSIN ELECTRIC CO LTD
发明人
TAKEUCHI TOMOSHI;SHIOJIRI SHIRO
分类号
C23C14/48;H01J37/317;H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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