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发明名称
BESCHICHTUNGSVORRICHTUNG
摘要
申请公布号
DE3721373(A1)
申请公布日期
1989.01.12
申请号
DE19873721373
申请日期
1987.06.29
申请人
LEYBOLD AG
发明人
HUBERT,PETER;KUSSEL,BARBARA,DIPL.-PHYS.DR.;WIRZ,PETER,DIPL.-PHYS.DR.
分类号
C23C14/36;C23C14/35;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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