DETECTION OF END POINT OF GAS ETCHING,申请号JP19870164728-传众专利搜索

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发明名称	DETECTION OF END POINT OF GAS ETCHING
摘要
申请公布号	JPS648625(A)	申请公布日期	1989.01.12
申请号	JP19870164728	申请日期	1987.06.30
申请人	KYOCERA CORP	发明人	IWASAKI AKINORI;OKUBO DAIGORO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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