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发明名称
COATING METHOD
摘要
申请公布号
JPS648620(A)
申请公布日期
1989.01.12
申请号
JP19870162340
申请日期
1987.07.01
申请人
HITACHI LTD
发明人
NAGAMINE TETSUJI;YAITA SAKAE;MORI TOSHIHISA;AKAHA RYOZO
分类号
B05D1/40;G03F7/16;H01L21/027;H01L21/30
主分类号
B05D1/40
代理机构
代理人
主权项
地址
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