发明名称 GASEINLASS FUER EINE MEHRZAHL VERSCHIEDENER REAKTIONSGASE IN REAKTIONSGEFAESSE
摘要 A gas inlet for a plurality of various reaction gases in reaction vessels, in which the gases flow at a high flow rate, with supply lines of substantially smaller cross-section than the reaction vessel, is characterized by the combination of the following features: the gas inlet has a part (1) with a conicoidal internal contour (4) whose cross-section matches that of the reaction vessel and which is arranged at one end (3) of the reaction vessel (not shown) through which the gases flow, the individual supply lines (5, 6) open into the region of the focus of the part with conicoidal internal contour, the gas outlet orifices (7, 8) of the supply lines are directed towards the apex of the part with conicoidal internal contour.
申请公布号 DE3721637(A1) 申请公布日期 1989.01.12
申请号 DE19873721637 申请日期 1987.06.30
申请人 AIXTRON GMBH 发明人 JUERGENSEN,HOLGER,DR.
分类号 A61K38/00;A61K39/00;B01F3/02;B01J4/00;B01J12/02;C07K14/18;C07K16/10;C12N7/00;C12Q1/70;C23C16/44;C23C16/455;C30B25/14;H01L21/205;(IPC1-7):B01J12/00;C30B35/00 主分类号 A61K38/00
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