| 摘要 |
PURPOSE:To effectively remove even fine air bubbles in a photosensitive coating soln. by passing the coating soln. through the inside of a spiral tubular porous polymeric membrane under pressure, and depressurizing the outside of the membrane. CONSTITUTION:The photosensitive coating soln. 25a is pressurized to >=0.5kg/cm<2>, supplied from a soln. inlet 13a, introduced to the inlet 10a of the tube, and passed through the inside of the spiral tube 10 of the porous polymeric membrane of polytetrafluoroethylene resin, etc. In the meantime, the air dissolved in the soln. is diffused to a reduced-pressure chamber 12 and removed, the fine air bubbles are moved to the inner wall of the tube 10 by centrifugal force and removed, and the deaerated and defoamed photosensitive coating soln. 25b is obtained. The degree of vacuum in the reduced-pressure chamber 12 is detected by a pressure sensor 16, a vacuum pump 15 is operated based on the result, and the reduced-pressure chamber 12 is kept at a desired vacuum. |
