| 摘要 |
PURPOSE:To provide a superconductive thin film consisting of laminated of group IIIa-Ba oxide-Cu oxide with high reproductivity by placing group IIIa-Ba and Cu on a base one over another, and irradiating oxygen neutral beam. CONSTITUTION:Three mutually independent evaporation cells 1-3, a base holder 4, and an oxygen ion source 8 are installed in a vacuum chamber. Group IIIa metal, Ba and/or its oxide, and Cu and/or its oxide are placed on a base 9 one over another, and oxygen neutral beam is irradiated to the deposit of Ba, Cu, and/or their oxides to accomplish a film of laminate layers 10-12 of group IIIa metal, Ba oxide-Cu oxide. This allows easy preparation of an oxide ceramic superconductive film with high reproductivity and easily. |
