| 摘要 |
PURPOSE:To efficiently remove even fine air bubbles in a photosensitive coating soln. by passing the photosensitive coating soln. under pressure through a spiral tubular porous polymeric membrane in which a larger-inner diameter tube and a smaller-inner diameter tube are arranged in series, and depressurizing the outside of the membrane. CONSTITUTION:The photosensitive coating soln. 25a is pressurized to >=0.5kg/cm<2>, supplied from a soln. inlet 13a, introduced to the tube inlet 10a, and passed through the inside of the spiral tube 10 of the porous polymeric membrane of polytetrafluoroethylene resin, etc. In the meantime, deaeration is mainly carried out at the part of the tube having larger inner diameter, defoaming is mainly carried out at the part of the tube having smaller inner diameter, and a deaerated and defoamed photosensitive coating soln. 25b is obtained. The removed dissolved air diffuses into a reduced-pressure chamber 12, the degree of vacuum therein is detected by a pressure sensor 16, a vacuum pump 15 is operated based on the result, and the reduced-pressure chamber 12 is kept at a desired vacuum. |
