| 摘要 |
PURPOSE:To reduce the size of an X-ray producing window, to reduce the thickness of the window and to effectively produce an X-ray by using an X-ray mirror having a condensing action as an X-ray mirror, and disposing the window near the focus of an optical system. CONSTITUTION:A radiation light irradiated from a synchrotron radiation light source 2 is reflected on an X-ray mirror, and irradiated on a workpiece 8 coated with X-ray resist 7 through an X-ray mask 6. As an X-ray mirror in such an X-ray aligner, an X-ray mirror 4 having a condensing action is used, and an X-ray producing window 15 is disposed near the focus of an optical system. For example, a vibrating X-ray mirror is formed as an X-ray condensing mirror 4 having a horizontal focusing action like a cylindrical or toroidal mirror, and a focus is set between the mirror 4 and an exposure position. The window 15 is mounted near the focus, and a helium tank 10 is formed at the downstream side of the window. Thus, the area of the window is reduced to support a differential pressure by the thin window to improve the X-ray producing efficiency. |
