| 摘要 |
PURPOSE:To obtain a substrate for a distortion detecting element excellent in chemical resistance, electric insulation, leak resistance and accuracy as well, by applying a polyimide resin layer on a stainless plate or an aluminum plate. CONSTITUTION:A polyimide resin with a structure, given by the formula I, 10-30mol.% in the repeated unit and a copolyimide resin, given by the formula II, with 90-70mol% for the rest are applied on a stainless plate or an aluminum plate. Here, these resins are dissolved in a dimethyl formamide solvent to be filtered with a filter with a hole diameter of 1mum, immediately after the application of the resins, treated at 80 deg.C for 15min and, then, at 320 deg.C for 5min with a continuous rise in the temperature. Thereafter, a Cu-Ni based alloy film is applied on the resins as normal by sputtering or the like and an etching is performed to make a specified pattern and a wire is applied to fetch an electrical signal to produce a distortion detecting element. |
