| 摘要 |
PURPOSE:To observe a sample shape during working by a camera which is much faster than a conventional camera by cutting only a laser having a laser wavelength for working a sample of two laser beams reflected on the surface of the sample by a filter so that only the laser beam as an illumination light can be observed by a high speed camera. CONSTITUTION:Two lasers 10, 20 having different wavelengths, one of which is used for working a sample and the other of which is used as an illumination light are provided, the two lasers are irradiated to a sample 60 to be worked, and only the light having the wavelength of the laser 10 for working the sample of the two laser beams reflected on the surface of the sample 60 is cut by a filter 70 so that only the laser beam as the illumination light can be observed by a high speed camera. For example, two of Ar laser 10 having 18W of maximum output for working a sample and 457.9-514.5nm of wavelength for working the sample, and an He-Ne laser having 25mW and 632.8nm of wavelength for an illumination light are irradiated through the same axis by half mirrors 30, 40 to the sample 60, and only the light of the laser 10 of the reflected lights is cut by a gelatin filter 70. |
