| 摘要 |
PURPOSE: To obtain a characteristic spectrum showing resistance against high temp., and especially to obtain high solubility by using a specified hydroxy polyamide as a polybenzo oxazole precursor. CONSTITUTION: A hydroxy polyamide expressed by formula I is used as a polybenzo oxazole precursor. In formula I, R, R*, R1 , R1 * are aromatic groups, n1 , n2 are 1 to 100, R1≠R1 and/or R1≠R1 *. This hydroxy polyamide is a polycondensation product produced from an aromatic diamino dihydroxy compd. and an aromatic dicarboxylic acid or dicarboxylic acid chloride, and more particularly, it is a co-condensation product. Thereby, a positive resist having heat resistance or resistance against high temp. and excellent solubility can be obtd. |
