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发明名称
TOP IMAGED RESISTS
摘要
申请公布号
EP0251241(A3)
申请公布日期
1989.01.11
申请号
EP19870109212
申请日期
1987.06.26
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ALLEN, ROBERT DAVID;CHIONG, KAOLIN N.;CHOW, MING-FEA;MACDONALD, SCOTT ARTHUR;YANG, JER-MING;WILLSON, CARLTON GRANT
分类号
H01L21/027;G03F7/038;G03F7/20;G03F7/26;G03F7/38;(IPC1-7):G03F7/26
主分类号
H01L21/027
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