| 摘要 |
A fluid filter element, filter, and process for its fabrication, wherein the filter element includes a flat base and a thin layer deposited thereupon having a pattern of channels through which a fluid may flow. In operation, the element is pressed against a flat surface, preferably the back side of another element in a stack of filter elements, whereupon the channels become closed conduit. The channels have a minimum dimension of the thickness of the layer, so that larger particles may not pass therethrough. Fabrication of the thin layer with the channels therein is preferably accomplished by masking a pattern corresponding to the channels and then vapor depositing the remainder of the thin layer, as masking and deposition permits accurate control of the height of the deposited layer, and, then, the minimum dimension of the channels.
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