Radiation hardened semiconductor device and method of making the same

摘要

An N-channel transistor formed in a layer of semiconductor material disposed on a insulating substrate is disclosed. The source region has a depth less than the thickness of the semiconductor layer so that a P-type region can be formed in the semiconductor layer between the source region and the insulating substrate. This P-type region has an impurity concentration sufficient to prevent the depletion region of the source from extending to the interface between the layer of semiconductor material and the substrate. The P-type region substantially prevents back-channel leakage currents from flowing between the source region and the drain region along the portion of the layer of semiconductor material immediately adjacent the insulating substrate when the device has been irradiated.