发明名称 Method for selective heteroepitaxial III-V compound growth
摘要 PCT No. PCT/GB86/00423 Sec. 371 Date May 20, 1987 Sec. 102(e) Date May 20, 1987 PCT Filed Jul. 18, 1986 PCT Pub. No. WO87/00694 PCT Pub. Date Jan. 29, 1987.A method of producing a heterostructure device comprises defining in a substrate 5 of group III-V semiconductor material a structure, such as a mesa 9, having first and second faces oriented substantially parallel to the (100) and (111)A crystallographic planes. The mesa 9 is exposed to group III-V chemical reagents thereby to deposit group III-V materials on the first and/or second faces in dependence upon the group V constituent in the chemical reagents.
申请公布号 US4797374(A) 申请公布日期 1989.01.10
申请号 US19870034178 申请日期 1987.05.20
申请人 PLESSEY OVERSEAS LIMITED 发明人 SCOTT, MICHAEL D.;MOORE, ALAN H.
分类号 H01L21/205;H01L21/20;H01L21/306;H01L33/00;H01S5/00;H01S5/20;H01S5/22;H01S5/227;H01S5/323;H01S5/343;(IPC1-7):H01L21/20;H01L21/76 主分类号 H01L21/205
代理机构 代理人
主权项
地址