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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS645033(A)
申请公布日期
1989.01.10
申请号
JP19870160615
申请日期
1987.06.26
申请人
NEC CORP
发明人
YOSHIMURA KATSUNOBU
分类号
H01L21/3205;H01L21/82;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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