发明名称 Method of manufacturing amorphous silicon field effect transistors
摘要 An a-Si FET comprising electrically conductive source and drain regions supported by an insulating substrate; a layer of amorphous silicon which is separately deposited in a space between said source and drain regions so as to engage the source and drain regions; source and drain electrodes electrically connected with said source and drain regions respectively; a gate electrode disposed adjacent said layer of amorphous silicon; and an insulating layer separating the gate electrode from the amorphous silicon layer; the arrangement being such that, in the ON state of the FET, a direct current-path is established in the layer of amorphous silicon which is disposed in said space. A low cost, low-temperature substrate such as soda glass may be used and the a-Si FET may be of the thin film type. Such an a-Si FET can be used in an LCD device which is addressed using one or more of the FET's.
申请公布号 US4797108(A) 申请公布日期 1989.01.10
申请号 US19860939967 申请日期 1986.12.10
申请人 LUCAS INDUSTRIES PUBLIC LIMITED COMPANY 发明人 CROWTHER, SIMON N.
分类号 H01L29/78;G02F1/136;G02F1/1368;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/78 主分类号 H01L29/78
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