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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS644053(A)
申请公布日期
1989.01.09
申请号
JP19870157739
申请日期
1987.06.26
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
KANEDA KOJI;OBARA TETSUJI;ENOMOTO MINORU
分类号
H01L23/50;H01L25/00
主分类号
H01L23/50
代理机构
代理人
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地址
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