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发明名称
METHOD FOR FORMING CRYSTAL
摘要
申请公布号
JPS643096(A)
申请公布日期
1989.01.06
申请号
JP19880069859
申请日期
1988.03.25
申请人
CANON INC
发明人
YONEHARA TAKAO
分类号
H01L21/208;C30B19/00;C30B19/12;C30B29/06
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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