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经营范围
发明名称
CENTRIFUGAL DRYING DEVICE
摘要
申请公布号
JPS642324(A)
申请公布日期
1989.01.06
申请号
JP19870156914
申请日期
1987.06.24
申请人
NEC CORP
发明人
MATSUWAKA ATSUJI
分类号
B04B15/08;F26B5/08;H01L21/304
主分类号
B04B15/08
代理机构
代理人
主权项
地址
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