| 摘要 |
<p>PURPOSE:To miniaturize the title device in a semiconductor manufacturing process by arranging so as to prevent the floating up of a tray by pushing both sides of it from above, and move up and down and reciprocate feed claws below the tray and engage/disengage them with recessed grooves at the bottom surface of the tray and transport the tray. CONSTITUTION:A rack is reciprocated by expanding and contracting the rod of a drive cylinder 20, then, a pinion 17 rotates and feed claws 14 rotate along with a shaft 15. As a result, feed claws 14 are engaged/disengaged with recessed grooves formed at every housing pitch of a product at the lower surface of a tray. At this time, the tray does not float up as it is pressed down by means of a floating up prevention member 27. And, a drive cylinder 26 is operated in a state in which feed claws 14 are made to be engaged with recessed grooves, and the shaft 15 is moved by 1 pitch in a K direction, and the tray is moved by 1 pitch. Next, feed claws 14 are replaced by bringing down feed claws 14. As a result, a device can be miniaturized and occupying space can be diminished.</p> |
