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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS642347(A)
申请公布日期
1989.01.06
申请号
JP19870156443
申请日期
1987.06.25
申请人
TOSHIBA CORP
发明人
MAEDA TAKEO;MAKITA KOJI
分类号
H01L27/06;H01L21/8249
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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