| 摘要 |
<p>PURPOSE:To draw a fixed thick-film circuit pattern at all times by previously measuring displacement to a reference plane of a substrate along a path to be drawn on the substrate and controlling a nozzle so that a space between the substrate and the nozzle is kept constant on the basis of the result of the measurement. CONSTITUTION:When a think-film circuit pattern 8 is formed onto a ceramic substrate, a ceramic substrate 4a is positioned and sucked under a vacuum onto a first substrate stage 3a first, and an X-Y table 2 is NC-controlled and displacement to a reference plane of a position to be pattern-drawn is measured while laser beams 9 from a laser type gap measuring instrument 5 are moved along a virtual pattern 10. The displacement of face reference points 7a-7c is measured previously by the measuring instrument 5 at that time, and a plane passing through the three points is used as the reference plane and the displacement of the virtual pattern 10 is indexed. The beforehand measured substrate 4a is shifted to a second stage and positioned and sucked at the same reference position, and Z-axis adjustment and drawing are started so that a gap between a nozzle 6 and the substrate 4b is kept constant on the basis of the result of the measurement of the pattern 10.</p> |
