| 摘要 |
PURPOSE:To monitor a state during laser beam machining without giving an effect on a laser beam by utilizing a refractive index of a machining lens between the carbonic acid gas laser beam and the visible radiation being different from each other. CONSTITUTION:When a reflected light beam of an illuminator 14 or the light emission by the laser beam machining passes the machining lens 5 and a second lens 10 from the surface of a work 6, the visible radiation 13 is refracted large than the carbonic acid gas laser beam 2. On the other hand, since the beam diameter of the focusing position 12 of the carbonic acid gas laser beam 2 is small, a mirror 17 with a fine hole 6 is provided with a gradient and the laser beam 2 is passed through it, by which only the visible radiation 13 can be reflected. The radiation 13 is condensed by an image-formation lens 18 and an image of the focusing position 20 of the work 6 is formed at the image- formation position by a TV camera 19 or the eyes. Accordingly, the state during the laser beam machining can be monitored without giving the effect on the carbonic acid gas laser beam 2. |
