LASER CHEMICAL VAPOUR DEPOSITION,申请号GB19880027836-传众专利搜索

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发明名称	LASER CHEMICAL VAPOUR DEPOSITION
摘要
申请公布号	GB8827836(D0)	申请公布日期	1988.12.29
申请号	GB19880027836	申请日期	1988.11.29
申请人	GENERAL ELECTRIC CO PLC	发明人
分类号	C30B25/00;C23C16/04;C23C16/48;H01L21/205;H01L21/263;(IPC1-7):C23C16/48	主分类号	C30B25/00
代理机构		代理人
主权项
地址

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