Method for the ion beam treatment and coating of powders

摘要

The invention relates to a method for ion beam treatment and coating of diverse powders (grain size < 1 mu m), in which the powder circulates continuously in a vacuum chamber and is bombarded in free fall by means of ions for the purpose of implantation, cleaning, coating or amorphisation, or is sputtered or vapour deposited by means of a vacuum coating method, and is subsequently filled in vacuum into a container for the purpose of further processing. The conveying device consists of a vibratory hopper conveyor and two vibrating chutes for producing powder curtains and accumulating powder or filling powder.