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发明名称
PRECISION PROBE POSITIONER
摘要
申请公布号
DE3475364(D1)
申请公布日期
1988.12.29
申请号
DE19843475364
申请日期
1984.08.29
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
HENDRIKS, FERDINAND;TAYLOR, RUSSELL HIGHSMITH
分类号
G01B21/00;B25J9/10;B25J9/14;B25J19/02;G01B11/00;G01B11/24;G01B21/20;G05D3/20;(IPC1-7):H01L21/68;B25J13/08
主分类号
G01B21/00
代理机构
代理人
主权项
地址
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