摘要 |
PURPOSE:To increase coupling efficiency and to enable the coupling to a semiconductor laser of a phase-locked type so that an optical integrated circuit such as optical head for high output is realized by providing three-dimensional light guides of multimodes to said circuit. CONSTITUTION:This optical integrated circuit has a two-dimensional light guide layer formed on a substrate, the three-dimensional light guides which are coupled and disposed to and in this guide layer in order to introduce the exit light of the semiconductor laser thereto, and a diffraction grating which is formed in a part of the two-dimensional light guide layer and has the shape capable of converting the light propagating in the guide layer via said three-dimensional light guide layer to the collimated beam of light or focused light in accordance with the wave front of said light. For example, a semiconductor substrate 1, a buffer layer (SiO2) 2, a light guide layer (PSG) 3 and clad layers 4, 5 respectively form the multiple three-dimensional light guides and diffraction grating. The light propagating from the phase-locked semiconductor laser 6 is released as the collimated beam of light to the outside by the diffraction grating 5. The optical integrated circuit for the high output is thereby realized. |