| 摘要 |
PURPOSE:To obtain a very thin and uniform magnetic thin film by obtaining a viscous solution via hydrolysis by mineral acid of metal alcoxide under a low pH condition, forming a layer of the viscous solution on a substrate, and drying and heat-treating it. CONSTITUTION:A solution of alcoxide, particularly alcoxide of transition metal of iron, such as Fe, Co or Ni is prepared. Then, hydrolysis is performed by slowly dropping water the pH of which was adjusted to be acid, particularly pH3 or less using a metal acid such as hydrochloric acid or nitric acid, thereby obtaining a viscous solution without causing precipitation or phase separation. A layer of the viscous solution of a predetermined viscosity is formed on a substrate. Finally, the substrate is dried to remove water, the solvent and the like and heat-treated at a high temperature so as to be recrystallized, thereby obtaining a magnetic thin film. With this, a very thin and uniform magnetic thin film.
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