| 摘要 |
PURPOSE:To uniformly give mirror surface working to a workpiece on a table and substantially improve the accuracy and reliability in working after grinding, for example metal vaporization, by using a superconductive motor for a drive means for rotating a grinding wheel. CONSTITUTION:A grinding wheel 3 is connected through shaft 4 to a compact and light superconductive motor 5 capable of generating 3,000rpm output or more necessary for mirror working. The grinding wheel 3 is rotated with high speed by the drive of said motor 5 without the deflection of shaft. On the other hand, a table 1 and a semiconductor wafer 2 mounted thereon are rotated in the direction of arrow and the rotating semiconductor wafer 2 is uniformly mirror worked by the grinding wheel 3 rotating with high speed. Thus, the worked surface of said wafer 2 subjected to mirror working with high accuracy has metal vaporized thereto stably.
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