| 摘要 |
PURPOSE:To automatically discharge especially a resist, etc., with high precision by carrying out a pumping action by electrical control in the title device for extracting a desired amt. of a liq. from a liq. storage part, pumping, and discharging the liq. CONSTITUTION:A driving motor 29 provided in a housing 17 is driven, and a lower member 16 is raised and closely attached to an upper member 15. The lower member 16 is then lowered by the driving motor 29 to expand a bellows 14 to the lower side. Namely, the volume of a charging chamber 21 is increased by the volume corresponding to the variation in the volume of the bellows 14, and the liq. is sucked by the amt. corresponding to the change in the volume of the charging chamber 21. The lower member 16 engaged with a ball screw 27 is then raised with respect to the upper member fixed to the housing 17. As a result, the liq. is discharged from a discharge port 20 by the volume corresponding to the deformation of the bellows 14. Since the discharge amt. is precisely proportional to the rise of the lower member 16 in this case, the discharge amt. can be easily controlled.
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