发明名称 Ion source
摘要 An ion beam source adapted to provide a plurality of parallel planar ion beams the centers of which are superimposed and the planes of which are inclined at an angle to the line joining their centers such that a geometric projection of the ion beams in a direction orthogonal to that joining the centers of the ion beams is continuous.
申请公布号 US4794298(A) 申请公布日期 1988.12.27
申请号 US19860904269 申请日期 1986.09.08
申请人 UNITED KINGDOM ATOMIC ENERGY AUTHORITY 发明人 PROUDFOOT, GARY
分类号 H01J27/02;H01J27/16;H01J37/08;H01J37/317;(IPC1-7):H01J39/34 主分类号 H01J27/02
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