| 摘要 |
PURPOSE:To measure the concentration of moisture in a high concentration sample gas, by using flow-rate adjusting devices, mixing the sample gas and a zero gas at a specified ratio, and measuring the mixed gas with a humidity sensor. CONSTITUTION:A sample gas is introduced into a crystal oscillator type sensor 5 through a sample-gas feeding part 2, a flow-rate adjusting device 3 and a three-way solenoid valve 4. Meanwhile, part of said sample gas is introduced into the sensor 5 through the gas feeding part 2, a zero-gas yielding part, a flow-rate adjusting device 8 and confluent part. As a result, the mixed gas of the sample gas and a zero gas is supplied to the sensor 5. The mixing ratio of the mixed gas can be set by adjusting the flow-rate adjusting devices 3 and 8, and a specified concentration can be set. The concentration of moisture in the mixed gas, which is diluted into the specified concentration, is measured with the humidity measuring sensor 5.
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