| 摘要 |
PURPOSE:To make the joints in the titled target free from difference in level and to prevent the peeling and cracking of the target during sputtering by setting spacers in the gap between target members and a backing plate. CONSTITUTION:When target members 101 of a Tb-Fe alloy or the like are soldered to a backing plate 104 of Cu or the like, the surfaces of the members 101 to be soldered are metallized with Cu or the like and a sheet of solder 103 contg. In or the like and fine wires of W or the like as spacers are set on the plate 104. The target members 101 are then put and soldered in an inert atmosphere. By this structure, a high quality target hardly causing peeling and cracking and having no difference in level at the joints can be obtd. |
