| 摘要 |
PURPOSE:To enable a uniform plasma distribution by placing a microwave permeable substance in a microwave introduction inlet which is opened in a plasma production chamber making its opening at the same level as the inner wall surface of the plasma production chamber. CONSTITUTION:A microwave permeable substance 5 is composed by furnishing a rectangular flange 5b a little larger than a disk 5a, on the disk 5a with a diameter and the size in the axial direction almost same as a microwave introduction inlet 1c. And the disk 5a is engaged closely with the microwave introduction inlet 1c, and moreover, the flange 5b is contacted to the microwave introduction inlet 1c placing an 0 ring or the like at the periphery of the microwave introduction inlet 1c, and the lower end surface of the disk 5a is positioned at the same level as the inner wall surface of the plasma production chamber 1. Since the plasma introduction inlet 1c is in the condition filled with the microwave permeable substance 5 placing no clearance, no abnormal reflection of the microwave is generated, the reflection rate of the microwaves is reduced accordingly, and the generation of the plasma is also made uniform.
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