| 摘要 |
PURPOSE:To realize the stability and the high rigidity by a method wherein a force instruction signal obtained by calculating a function is given to a first bearing and a second bearing so that a control loop between spatial support devices cannot interfere even when an object to be controlled is shifted horizontally in a horizontal direction and that a loop gain at the individual spatial support devices cannot be changed. CONSTITUTION:Two sets of spatial support devices 21, 22 and a horizontal- direction displacement sensor 3 are installed; a function is calculated by using the following: an output signal fS1 of a phase compensator of the first spatial support device 21; an output signal fS2 of a phase compensator of the second spatial support device 22; a displacement signal y of the horizontal-direction displacement sensor 3. Then, a force instruction signal fS1* of the first spatial support device 21 and a force instruction signal fS2* of the second spatial support device 22 are obtained. By this setup, a non-interference system can be constituted between two bearings; even when a movable part is shifted in a horizontal direction, a control loop between the individual bearings does not interfere; a loop gain is not changed; accordingly, an extremely stable floating system can be constituted and the rigidity of the bearings can be enhanced. |
