| 摘要 |
PURPOSE:To prevent the reduction of magnetic permiability mu in a high frequency area and to execute excellent recording and reproducing by forming 1st and 2nd magnetic layers consisting of ferromagnetic metal material on a substrate as the magnetic layers segmented by a separation layer generated due to the interruption of a thin film forming process. CONSTITUTION:The substrate 1 consisting of ferrite or the like is prepared and the 1st magnetic layer 9a consisting of Sendust having crystal structure is formed on the upper surface of the substrate 1 by sputtering. Under the status that inert gas such as Ar used for the sputtering process is being led as it is, the sputtering is interrupted for about 10min. The substrate 1 is quenched by the inert gas and an interface layer 11 is formed on the 1st magnetic layer 9a. Then, the 2nd magnetic layer 9b consisting of Sendust is formed on the interface layer 11 by sputtering. The 3rd and 4th... magnetic layers segmented by respective interface layers are attached by repeating said operation to form a thick lower magnetic layer 9. A gap spacer 3 is formed and a conductive coil layer 4 and an inter-layer insulating layer 5 are also formed. An upper magnetic layer 10 is similarly formed. Consequently, eddy-current loss is not generated, excellent recording and reproducing can be attained and mass- productivity can be improved. |
