| 摘要 |
<p>PURPOSE:To achieve improvement of water resistance, by using only valve action metal or noble metal without migration as a metallic element composing a conductor layer and a thin film resistor of a thermal head. CONSTITUTION:Materials selected from valve action metals like Ta, Nb, Hf, W, and Si are used as metallic elements for resistance heating element layer 2, and materials selected from valve action metals like Ta, Nb, Hf, W, and Si and noble metals like Au, Pt, Pd, Rh, and Re are used as metallic elements composing all the layers other than the resistance heating element layer 2 and protection layers 6, 7. The resistance heating element layer 2 composed of, for instance, tantalum nitride (TaN) is coated on the thermal resistance substrate 1. Then, a conductor layer 4 composed of Au and an intermediate layer 5 composed of tantalum nitride are successively coated thereon. Thereafter, a pattern is so formed as to expose a part of the resistance heating element layer 2, and a heating part is prepared. Then, a first protection layer 6 composed of SiO2 and a second protection layer 7 composed of a mixture of SiO2.Ta205 are so formed as to cover all the heating part.</p> |
