| 摘要 |
<p>PURPOSE:To contrive compactness of the title device and to contrive an improvement in sealing efficiency, by providing specific sealing mechanisms on an inlet and outlet sides of a vacuum treatment chamber. CONSTITUTION:A sealing mechanism is provided with a first pair of sealing rolls of the same diameter, which are in parallel respectively with a plane of a sheet 14 of a thing to be treated and transferred, arranged at right angles with a transfer direction and supported turnably at intervals. A second pair of sealing rolls 4, 5 of the same diameter, which come into contact respectively with the first pair of sealing rolls 2, 3 run parallel with one another and supported turnably at intervals mutually. Those pairs of sealing rolls are arranged alternately on the top of a regular square or a rhombus and a pocket 16 is formed on the inside. A pair of fixed seal members 6, 7 is provided to a wall 15. A space among the wall 15 of each vacuum treatment chamber 1 and the first pair of sealing rolls 2, 3 is sealed. The pocket 16 plays a role of a prevacuum chamber and can make a device compact. Then even if a clearance between transit rolls is changed, there are no changes on clearances among the sealing rolls 2, 3 and sealing members 6, 7.</p> |
