发明名称 SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要 <p>PURPOSE:To prevent dust generation to the outside, by covering a dust generat ing part with a dust cover, and sucking the inside of the dust cover with a dust collector. CONSTITUTION:After a shutter 14a installed on the side of an loader 4 is opened and a work is supplied, the shutter 14 is closed, and at the same time an upper platen 9b descends to perform clamping. After clamping, a tablet is injected into a metal mold, and seal forming and curing are performed. After curing is finished, the upper platen 9b ascends, and at the same time, a shutter 14b on the side of an unloader 5 is opened. A molded article is taken out by the unloader 5. Then the shutter 14b on the side of the unloader 5 is closed, the metal mold is brushed by a cleaner 7. After brushing, air is blown from the front side to blow out resin burr into a dust duct 21. During the above operation, the insides of dust covers 13a, 13b, 13c are sucked by the dust duct 21 connected to a dust collector, and dust generation to the outside can be prevented.</p>
申请公布号 JPS63314840(A) 申请公布日期 1988.12.22
申请号 JP19870151654 申请日期 1987.06.17
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMAUCHI TOSHIHARU
分类号 H01L21/52;H01L21/56;H01L21/60 主分类号 H01L21/52
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