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发明名称
VERFAHREN ZUR FOTOLITHOGRAFISCHEN STRUKTURUEBERTRAGUNG IN DER HALBLEITERTECHNIK
摘要
申请公布号
DD263147(A1)
申请公布日期
1988.12.21
申请号
DD19870305231
申请日期
1987.07.22
申请人
VEB MIKROELEKTRONIK "KARL MARX" ERFURT,DD
发明人
WAGNER,ROLAND,DD;HERRIG,MATTHIAS,DD;BAUER,JOACHIM,DD
分类号
(IPC1-7):G03F7/02
主分类号
(IPC1-7):G03F7/02
代理机构
代理人
主权项
地址
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