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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY DEVICE
摘要
申请公布号
GB8826593(D0)
申请公布日期
1988.12.21
申请号
GB19880026593
申请日期
1988.11.14
申请人
MITSUBISHI DENKI KK
发明人
分类号
H01L29/73;H01L21/331;H01L21/76;H01L21/762;H01L21/763;H01L21/8229;H01L27/06;H01L27/10;H01L27/102;H01L29/732;(IPC1-7):H01L21/265
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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