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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
GB8826641(D0)
申请公布日期
1988.12.21
申请号
GB19880026641
申请日期
1988.11.15
申请人
FUJI ELECTRIC CO LTD;FUJITSU LTD
发明人
分类号
C23C16/515;H01J37/32;(IPC1-7):H01J37/32
主分类号
C23C16/515
代理机构
代理人
主权项
地址
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