| 发明名称 |
Ion source with four electrodes. |
| 摘要 |
<p>Vacuum arc ion-source comprising an anode (2 or 3) and a cathode (1) which are arranged facing one another, and are brought to different potentials, and in which the plasma (7) is emitted perpendicularly to the surface of the cathode. This plasma is projected by means of two suitably polarised free-standing gates (4 and 5).
<??>Application to the implanting of metal ions.
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| 申请公布号 |
EP0295743(A1) |
申请公布日期 |
1988.12.21 |
| 申请号 |
EP19880201173 |
申请日期 |
1988.06.08 |
| 申请人 |
SOCIETE D'ETUDES ET DE REALISATIONS NUCLEAIRES - SODERN;N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
BERNARDET, HENRI |
| 分类号 |
H01J27/02;H01J27/08;H01J37/08;(IPC1-7):H01J27/02;H01J49/12 |
主分类号 |
H01J27/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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