| 摘要 |
PURPOSE:To control the temperature distribution to be equalized by a method wherein the temperature is set up by adopting a structure in which a temperature detecting means is brought into direct contact with temperature detecting substrates previously mounted in a furnace core tube. CONSTITUTION:A thermocouple 7 as a temperature detecting means protected with a quartz cover vetically penetrates through a boat holding base 6 and mounted on the base 6 to be brought into contact with orientation flats of respective almost disc type substrates 3. Thus, the temperature of respective substrates 3 can be measured. This thermocouple 7 generates thermoelectromotive force corresponding to the temperature at the contact parts with respective substrates 3 to be detected by connecting the thermocouple 7 to a proper outer circuit. Through these procedures, the temperature of heaters 2 is partially controlled to make the temperature distribution uniform in a furnace core tube 1.
|
